3D AND 2D MEASUREMENT SYSTEM AND METHOD WITH INCREASED SENSITIVITY AND DYNAMIC RANGE

摘要

The present invention provides a Fast Moiré Interferometry (FMI) method and system for measuring the height profile of an object with an increase precision by combining a plurality of image features. In one large aspect of the invention, two or several images are acquired under different conditions,to yield two or several images: Ia'(x,y), Ia''(x,y),... instead of one single image Ia(x,y). This is repeated for images obtained with different grating projection "b", "c", and "d". These images are combined to provide combined images or a merged phase value, which are used to determine the object height profile.