发明名称 |
METHOD FOR APPLYING A RESIST LAYER, USES OF ADHESIVE MATERIALS, AND ADHESIVE MATERIALS AND A RESIST LAYER |
摘要 |
The invention relates to a method wherein a resist layer (12) is applied to a base layer (24). The resist layer (12) is made of an adhesive material, the adhesive force thereof either reducing or increasing during radiation. Removal of residue of the resist layer (12) is made easier due to said method. |
申请公布号 |
WO2004059393(A3) |
申请公布日期 |
2005.04.07 |
申请号 |
WO2003EP14460 |
申请日期 |
2003.12.18 |
申请人 |
INFINEON TECHNOLOGIES AG;KROENINGER, WERNER;SCHNEEGANS, MANFRED |
发明人 |
KROENINGER, WERNER;SCHNEEGANS, MANFRED |
分类号 |
G03F7/16;G03F7/32;G03F7/34 |
主分类号 |
G03F7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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