发明名称 METHOD FOR APPLYING A RESIST LAYER, USES OF ADHESIVE MATERIALS, AND ADHESIVE MATERIALS AND A RESIST LAYER
摘要 The invention relates to a method wherein a resist layer (12) is applied to a base layer (24). The resist layer (12) is made of an adhesive material, the adhesive force thereof either reducing or increasing during radiation. Removal of residue of the resist layer (12) is made easier due to said method.
申请公布号 WO2004059393(A3) 申请公布日期 2005.04.07
申请号 WO2003EP14460 申请日期 2003.12.18
申请人 INFINEON TECHNOLOGIES AG;KROENINGER, WERNER;SCHNEEGANS, MANFRED 发明人 KROENINGER, WERNER;SCHNEEGANS, MANFRED
分类号 G03F7/16;G03F7/32;G03F7/34 主分类号 G03F7/16
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