| 摘要 |
<p>An environment holding apparatus, comprising a first chamber holding a specimen and having an open surface, a moving stage having the first chamber thereon and moving two-dimensionally, and a first surface having an inlet part for introducing a gas of specified conditions into the first chamber through a pipe and installed to cover the open surface of the first chamber. The first surface is installed to be fixed relative to the movement of the moving stage, and the open surface of the first chamber is two-dimensionally moved along the first surface by the movement of the moving stage.</p> |
