| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for surely obtaining a multilayer ceramic substrate with a cavity wherein calcination shrinkage is little and dimensional accuracy is high. <P>SOLUTION: This manufacturing method includes a process wherein green sheets s4-s6 and green sheets s1-s3 having pierced holes c are laminated and a green sheet lamination ss with a cavity C is formed, a process wherein the inside of the cavity C is filled with a paste-shaped inorganic composition z whose sintering temperature is higher than those of the green sheets s1-s6 while decompressing is performed, a process wherein calcination shrinkage suppression sheets y1, y2 whose sintering temperatures are higher than those of the green sheets s1-s6 are laminated on both surfaces 1, 2 of the lamination ss with the cavity C which contains inorganic composition z and a compound lamination fs is formed, a process wherein the calcination of the compound lamination fs is performed at sintering temperatures of the sheets s1-s6, and a process wherein the calcination shrinkage suppression sheets y1, y2 and the inorganic composition z which are not yet sintered are eliminated from the compound lamination fs after calcination. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
