| 摘要 |
PROBLEM TO BE SOLVED: To obtain an aluminum nitride-metal joint substrate having high joining strength and excellent heat cycle characteristic stably with excellent reproducibility by optimizing the condition of the honing treatment for the surface of an aluminum nitride substrate in the manufacture of the aluminum nitride-metal joint substrate. SOLUTION: A substrate shaped aluminum nitride sintered compact 1 is prepared and glass beads 2 having 45-106μm average particle diameter is sprayed on the surface 1a of the aluminum nitride sintered compact 1 to treat the sintered compact surface 1a. The aluminum nitride-metal joint substrate 6 is formed by joining a metallic plate 5 to the treated surface (substrate surface) 4a of the aluminum nitride substrate 4 surface-treated in this way by, for example, an active metal method. COPYRIGHT: (C)2005,JPO&NCIPI
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