| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that when gas is treated with plasma in a treatment apparatus in which a dielectric is packed between electrodes, the dielectric itself has adsorbing and desorbing actions to cause a poisonous gas component from the dielectric even after the treatment is stopped and a toxic by-product is produced by the chemical action of the dielectric. SOLUTION: This plasma system gas treatment apparatus for removing the poisonous gas component by the plasma is provided with a high-voltage AC power source and the electrodes which are connected to the AC power source and arranged opposite to each other. An electric insulator-coated ceramic dielectric pellet is packed between the electrodes. The poisonous gas component is removed by plasma by making the gas containing the poisonous gas component pass through gaps among a group of the dielectric pellets. COPYRIGHT: (C)2005,JPO&NCIPI |
