| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft magnetism thin film which is easy for film formation because of a single layer film, and exhibits a superior soft magnetism property in a high frequency band of a GHz region. SOLUTION: The soft magnetism thin film comprises a compound organization which includes a ferromagetic Fe crystal grain which contains C of 10-35 at%, and has a composition in which a remaining portion is substantially composed of Fe and whose average grain diameter is at most 20nm, and a ferromangetic amorphous phase occupying 30-75 vol%. COPYRIGHT: (C)2005,JPO&NCIPI
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