PROCESSING CHAMBER INCLUDING A CIRCULATION LOOP INTEGRALLY FORMED IN A CHAMBER HOUSING

摘要

An apparatus for and method of processing an object with a processing fluid. The apparatus comprises a processing chamber formed within a chamber housing and a fluid circulation loop integrally formed in the chamber housing. The method includes the step of circulating a fluid stream within a fluid circulation loop integrally formed in a chamber housing. The method also includes the step of generating a high-velocity fluid stream within a processing chamber.