Substrate e.g. semiconductor wafer, testing apparatus for use during semiconductor production, has two test arrangements that are jointly connected to handling system, substrate magazine station and alignment station

摘要

The apparatus has a handling system (3), substrate magazine station, an alignment station (10), and two test arrangements. The arrangements are jointly connected to the handling system, the substrate magazine station and the alignment station. The handling system and the stations are arranged in a common module. Each module has the same basic grid dimensions and each module can be connected to each other.