PLANAR LIGHTWAVE CIRCUIT DEVICE AND METHOD FOR PRODUCING THE SAME

摘要

A planar lightwave circuit device includes a lower clad layer extended from a substrate surface at a position corresponding to a lightwave circuit pattern to inside, an optical fiber guide groove formed on the substrate surface at a position corresponding to an optical fiber guide groove pattern extended from end of the lightwave circuit pattern, a core layer formed on the lower clad layer in correspondence to the lightwave circuit pattern, and an upper clad layer formed on the core layer. A method for producing the device includes forming a porous structural layer from a planar substrate surface for forming a lightwave circuit pattern to inside, forming a portion of the porous structural layer for patterning the lightwave circuit pattern into a lower clad layer, forming a core layer corresponding to the lightwave circuit pattern on the clad layer, and then forming an upper clad layer on the core layer.