发明名称 APPARATUS FOR SUPPLYING A CHIP WITH POWER FOR TESTING A CHIP
摘要 An apparatus for supplying a chip with power for testing the chip is provided to improve work efficiency of chip defect test and also to perform the chip defect test accurately. An apparatus supplies a power supply voltage to a port of a chip in order to check the defect of the chip. A plurality of probes(200) have a probe tip(220) applying the power supply voltage to the port on an end of a tip support part connected to a power supply cable, and a supporting block(230) is fixed to the tip support part, and a height adjustment unit moves the tip supporting part up and down in order to adjust the height of the probe tip. A plurality of moving blocks(300) have the first guide groove, and the supporting block of the probe is connected to move along the first guide grove by the first fixing unit. And a stage(400) has a chip, and a plurality of second guide grooves are formed near the chip, and the moving block is connected to move along the second guide groove by the second fixing unit.
申请公布号 KR20050032183(A) 申请公布日期 2005.04.07
申请号 KR20030068197 申请日期 2003.10.01
申请人 DONGBUANAM SEMICONDUCTOR INC. 发明人 KIM, SUN JU
分类号 G01R31/26;G01R1/06;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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