| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating electrode capable of effectively preventing the breakage of electrodes caused by a temperature change. <P>SOLUTION: The plasma generating electrode 1 comprises two or more electrodes 2 opposed to each other, and is capable of generating plasma by applying a voltage between the electrodes 2. At least one of the electrodes 2 comprises a ceramic element 3 as a dielectric, and a conductor 4. The ceramic element 3 has a thermal conductivity of ≥50 W/mK, a dielectric breakdown strength of ≥10 kV/mm, and a dielectric constant of ≥5. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
