发明名称 METHOD FOR FORMING ELECTRODE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for forming an electrode capable of improving a yield. <P>SOLUTION: The method for forming the electrode includes (a) an attachment preventive member 12 having a specified pattern is formed on a base body 10, (b) a conductive layer 20a is formed on the base body 10 and the member 12, and (c) the electrode having the specified pattern is formed by removing the conductive layer 20a on the member 12 in a state that the member 12 is installed on the base body 10. Adhesive properties of the member 12 and the conductive layer 20a are made smaller than those of the base body 10 and the conductive layer 20a. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005093673(A) 申请公布日期 2005.04.07
申请号 JP20030324450 申请日期 2003.09.17
申请人 SEIKO EPSON CORP 发明人 KANEKO TAKESHI;HIRAMATSU TETSUO
分类号 H01L21/28;H01B13/00;H01L21/285;H01L31/10;H01L33/36;H01S5/026;H01S5/042;H01S5/183;H01S5/343 主分类号 H01L21/28
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