| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus having a low cost plate-like dielectric substance, even if it is used for a large electrode. <P>SOLUTION: An alumina plate (first plate-like dielectric substance) 60 and an alumina plate (second plate-like dielectric substance) 61 are provided adjacent on opposite surfaces on the side of a hot electrode 11 of a ground electrode 21. Since the alumina plates 60, 61 are provided on the opposite surfaces of the ground electrode 21, a small low cost plate-like dielectric can be used for a large electrode instead of a large expensive plate-like dielectric. Since the opposite surfaces of the ground electrode 21 can be covered again by exchanging only the damaged alumina plate 60, when only the alumina plate 60 is damaged, the cost of the alumina plate can be reduced, as compared with the case when a sheet of large alumina plate is used. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
