METHOD OF FORMING THIN FILM PATTERN, ELECTROOPTIC DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of forming thin film pattern by which a time required for forming a thin film pattern can be shortened, and in addition, the thin film pattern can be formed inexpensively.

SOLUTION: The method of forming the thin film pattern by arranging a functional fluid on a substrate includes a fluid repelling step of imparting a liquid repelling property to the substrate; a lyophilic pattern forming step of forming a lyophilic section on the substrate by projecting ultraviolet rays upon the substrate after a metallic mask having the same opening pattern as that of the thin film pattern is arranged on the substrate imparted with the liquid repelling property; and a material arranging step of arranging the functional fluid in the lyophilic section by a droplet discharging method. It is also possible to perform O2plasma treatment instead of projecting the ultraviolet rays.

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