| 摘要 |
PROBLEM TO BE SOLVED: To accurately obtain various data for correcting an error in a drawing position occurring together with the movement of a stage and a drawing head, suppressing the increase of manufacturing cost of the device. SOLUTION: A stage moving device 1 comprises a stage 2 where a substrate 9 is set up, a stage moving mechanism 22 for moving the stage 2, a camera 41 for photographing the stage 2, a head moving mechanism 42 for moving the camera 41 to the direction almost perpendicular to the moving direction of the stage 2, and a measuring part 6 for measuring the moving quantity and the like of the stage 2 and the camera 41. With the stage moving device 1, the position of the stage 2 on the stage shaft, yawing over the stage shaft and the position of the camera 41 on the camera axis are measured and a orthogonal master pattern plate is photographed. Based on these data, straightness of the stage 2, complex shift reflecting the effect of yawing of the camera 41 and angle between the stage shaft and the camera axis can be obtained. COPYRIGHT: (C)2005,JPO&NCIPI |
