| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device and a polishing method of a rover including a magnetic head slider, controlling pressing independently in each head slider mounted on the rover to perform polishing with good accuracy. SOLUTION: This polishing device includes: a rotatable lapping surface plate 22; a housing 24 moved above the lapping surface plate; a rover holding tool 26 fixed to the housing, and composed of a rigid member 28 having two or more holes 62 and an elastic member 30 fixed to the rigid member; an air cylinder for pressing the whole rover; and a pressing means 66 individually pressing part of the elastic member 30 corresponding to two or more magnetic head sliders of the rover through the two or more holes 62 of the rigid member 28. COPYRIGHT: (C)2005,JPO&NCIPI |
