| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring a position, capable of precisely detecting (measuring) the position, by using an inexpensive and low precise encoder. SOLUTION: The apparatus for measuring the position is provided with a clock generator 12 which generates a sufficiently high-speed clock signal in comparison with an interval of an encoder pulse signal, and a counter device 13 which counts a slit spacing of the encoder by using the high-speed clock signal and heightens the resolution of the encoder on the basis of results of the counting measurement. COPYRIGHT: (C)2005,JPO&NCIPI
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