发明名称 |
PROJECTION EXPOSURE DEVICE, PROJECTION EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD |
摘要 |
A projection exposure device transfers a pattern formed on a mask R onto a substrate W via a projection optical system PL. The projection exposure device includes electricity removal devices (40-46) for removing electricity from a liquid (7) supplied to a portion between the projection optical system PL and the surface of its substrate W. This prevents destruction of the circuit pattern or malfunction of the device caused by charging of the liquid. |
申请公布号 |
WO2005031824(A1) |
申请公布日期 |
2005.04.07 |
申请号 |
WO2004JP14430 |
申请日期 |
2004.09.24 |
申请人 |
NIKON CORPORATION;NAGAHASHI, YOSHITOMO |
发明人 |
NAGAHASHI, YOSHITOMO |
分类号 |
G03F7/20;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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