Semiconductor wafer testing arrangement used in semiconductor production, has temperature control station that transfers wafer to prober through handling system, after applying thermal or mechanical load to wafer

摘要

The arrangement has a temperature control station (2) that is connected to a prober (1) through a handling system (3) only during testing. The temperature control station applies thermal, mechanical, electrical, physical or other chemical load to the semiconductor wafer and then transfers the wafer to prober through handling system for further testing. An independent claim is also included for method of testing semiconductor wafer under load.