SUBSTRATE PROCESSING DEVICE AND METHOD FOR HOLDING SUBSTRATE IN THE SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately position a substrate in a vacuum processing chamber in a substrate processing device for vacuum processing the substrate. SOLUTION: A substrate holder 5 having a hook 6 for holding a susceptor 11 for housing the substrate 10 and an elevator part 2 for holding the susceptor 11 carried in from an outside and moving the held susceptor 11 to the position of the hook 6 of the substrate holder 5 are provided in the vacuum processing chamber 200 of the substrate processing device having the vacuum processing chamber 200 for processing the substrate 10. And a fixing mechanism for fixing the susceptor 11 to the predetermined position of the hook 6 by bringing the susceptor 11 into contact with the hook 6 by rotating the hook 6 is provided to the substrate holder 5 when the elevating part 2 moves the susceptor 11 to the position of the hook 6. COPYRIGHT: (C)2005,JPO&NCIPI