| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that an adhesion force between a nozzle forming member and a water repellent layer is not enough and a durability to wiping is low, or that a nozzle diameter precision enough in terms of working cannot be obtained if the adhesion force is improved. SOLUTION: A polyimide resin/polyamide resin layer 53 is formed at the side of a liquid droplet discharging face of the nozzle forming member 52 as a base material which consists of a metal member and has a nozzle tip hole 51 formed thereat. An SiO<SB>2</SB>layer 54 and a fluorine system water repellent layer 55 are sequentially formed on the polyimide/polyamide resin layer 53 and the SiO<SB>2</SB>layer 54, respectively. A part protruding into a nozzle 4 is removed by a laser light from the side of a liquid chamber. Thus the nozzle 4 of a high diameter precision is formed. At the same time, the adhesion force between the nozzle forming member 52 and the fluorine system water repellent layer 55 is improved, so that the durability can be improved. COPYRIGHT: (C)2005,JPO&NCIPI
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