NEAR-FIELD LIGHT SOURCE DEVICE AND OPTICAL HEAD, OPTICAL DEVICE, EXPOSURE DEVICE, MICROSCOPE DEVICE HAVING SAME

摘要

PROBLEM TO BE SOLVED: To provide a near-field light source device with which a near-field light whose efficiency is satisfactory at a low threshold and in which fluctuation of light intensity is small and whose intensity is more improved by a stable oscillation mode can be obtained and an optical head, an optical device, an exposure device and a microscope device, each of which has the near-field light source device.

SOLUTION: The near-field light source device 100 comprises: a semiconductor laser 101 which is equipped with a plurality of straight line-shaped waveguides and a ring type optical resonator by corner mirror parts (105 to 107) for connecting these waveguides; and light shielding films (102, 103) in which a minute opening 104 whose size is equal to or smaller than a wavelength size is formed in one corner mirror part 105 of the corner mirrors, The device 100 is configured so that a diffraction grating is formed on the light shielding films and the light oscillated from the semiconductor laser with a laser mode is diffracted by the diffraction grating and higher order diffracted rays by the diffraction grating are coupled with a circulation mode in the ring type optical resonator.

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