AIR INLET OF DISPOSAL APPARATUS FOR POLLUTANT

摘要

PROBLEM TO BE SOLVED: To provide an air inlet of a disposal apparatus for a process exhaust gas containing pollutants which are especially produced in manufacturing semiconductor parts capable of preventing from forming deposits at the air inlet of the disposal apparatus for the process exhaust gas.

SOLUTION: The air inlet of this invention is so designed that a porous gas permeation wall is provided at the air inlet so as to be capable of supplying an inactive gas to the inside of the air inlet which assigns a passage of process exhaust gas to avoid the formation of the deposits at the air inlet of the disposal apparatus for the process exhaust gas.

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