| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized heat sensor capable of measuring with high sensitivity the heat generated in a chemical reaction or the like. SOLUTION: This heat sensor for measuring the heat by deformation of a thin film 1 has the thin film 1 deformed by heat, a plurality of plate spring-shaped elastic elements 2 supporting the thin film and deformed by the deformation of the thin film, and strain gages 5 provided on the plate spring-shaped elastic elements, for outputting the deformation of the plate spring-shaped elastic elements. The heat sensor is used for measuring the heat generated on the thin film by the output from the strain gages. The thin film 1 has a symmetrical shape with respect to the center and comprises layers of materials having a plurality of different thermal expansion coefficients, and the spring-shaped elastic elements 2 are arranged centrally symmetrically, and the strain gages 5 are formed thereon respectively. COPYRIGHT: (C)2005,JPO&NCIPI
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