| 摘要 |
A system and method for automatic defect classification is provided including at least one tool handler to receive a defect result file and at least one image file from a remote defect inspection tool, a process controller to create a data set from the defect result file and at least one image file, a database including a set of automated defect classification system (CADC) session data that includes data related to the data set, and a classification engine to automatically classify defects in the data set. A system and method for an automated monitoring system is provided including a production automatic defect classification (ADC) system, a monitoring CADC, and a monitor process to compare the defect result files of the production ADC system and said monitoring CADC.
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