Optische Elemente und Verfahren zum Vorhersagen der Leistung eines optischen Elements und optischen Systems

摘要

Optical members, methods of manufacturing optical members and predicting the performance of optical members in optical systems using excimer lasers are disclosed. The methods can be used in designing optical systems using excimer lasers. The methods include measuring the wavefront change of samples of glass at the operating wavelength of the optical system.