SYSTEM AND METHOD OF IMAGING THE CHARACTERISTICS OF AN OBJECT

摘要

A system and method for imaging the characteristics of an object (2) having at least a first (2a) and a second (2b) layer. The object (2) is illuminated by means of incident light (4), and light (5b) reflected from the object (2) is detected by means of an imaging sensor (6) in which the detected light is converted into electrical charges, according to which a representation of th e object (2) is created. Information on light scattered (5a) in the first laye r (2a) and the second layer (2b) of the object (2) is obtained from the representation and this information is compared to stored information in ord er to detect defects on the object (2).