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发明名称
摘要
申请公布号
JP3636337(B2)
申请公布日期
2005.04.06
申请号
JP19960168366
申请日期
1996.06.07
申请人
发明人
分类号
G03F7/20;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
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