发明名称 A method for separating plates which are bonded with each other and form a piled structure
摘要 The method involves subjecting a stacked hetero-structure to a bending force applied on all or part of the structure for separating the structure into two parts along a desired separation plane. The structure is subjected to a force directed along the plane, when more flexion force is applied. The separation plane is constituted by an interface between two collided plates (1, 2).
申请公布号 EP1520669(A1) 申请公布日期 2005.04.06
申请号 EP20040104612 申请日期 2004.09.23
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 MORICEAU, HUBERT;FOURNEL, FRANCK;ASPAR, BERNARD
分类号 B26F3/00;H01L27/12;B26D7/14;B32B37/00;B32B43/00;H01L21/00;H01L21/02;H01L21/20;H01L21/30;H01L21/304;H01L21/44;H01L21/46;H01L21/762 主分类号 B26F3/00
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