Pattern formation apparatus and manufacturing method thereof

摘要

In a pattern forming apparatus (60) that forms a pattern by jetting out an ink from nozzle opening sections of nozzles (10), the nozzles (10) are formed by bonding a top plate (2) to a surface of a substrate (1) on which a concave section is formed, and the substrate (1) is combined with the top plate by melting a combining layer (8,9) formed on at least one of the substrate (1) and the top plate (2). With this, the shape accuracy of the nozzle opening sections of the pattern forming apparatus is ensured.