| 摘要 |
A monolithic ink-jet printhead and a method of manufacturing the same are provided. The monolithic ink-jet printhead comprises a substrate, an ink chamber to be filled with ink to be ejected being formed on a front surface of the substrate, a manifold which supplies ink to the ink chamber being formed on a rear surface of the substrate, and an ink channel being vertically formed through the substrate between the ink chamber and the manifold; sidewalls, which are formed to a predetermined depth from the front surface of the substrate and define side surfaces of the ink chamber; a bottom wall, which is formed at a position of to a predetermined depth from the front surface of the substrate and define a bottom surface of the ink chamber; a nozzle plate, which includes a plurality of passivation layers stacked on the substrate and formed of an insulating material and a heat dissipating layer stacked on the passivation layers and formed of a metallic material having good thermal conductivity and through which a nozzle connected to the ink chamber is formed; a heater, which is disposed between the passivation layers of the nozzle plate, positioned above the ink chamber, and heats ink in the ink chamber; and a conductor, which is disposed between the passivation layers of the nozzle plate, electrically connected to the heater, and delivers a current to the heater. <IMAGE> |
