VACUUM SWING ABSORPTION TYPE OXYGEN GENERATION DEVICE

摘要

Provided is an oxygen generation apparatus in vacuum swing absorption mode employing a nitrogen vacuum pump having higher vacuum degree and an oxygen vacuum pump having lowered vacuum degree with magnetic force to reduce noise and stably generate oxygen. The apparatus(1) comprises a first adsorption bed containing adsorbent for nitrogen; a second adsorption bed containing adsorbent for nitrogen; an oxygen vacuum pump(10) connected to a first oxygen discharging side of the first bed and a second oxygen discharging side of the second bed; a first solenoid valve and a second solenoid valve; and a nitrogen vacuum pump having an inflow port and a discharging port for nitrogen. The nitrogen vacuum pump is a vibrational piston type pump while the oxygen vacuum pump is a diaphragm mode pump employing magnetic force to vibrate and pump.