OPTICAL DEVICE COMPRISING AN LIGHT SOURCE,申请号EP20030762496-传众专利搜索

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发明名称	OPTICAL DEVICE COMPRISING AN LIGHT SOURCE
摘要
申请公布号	EP1520210(A2)	申请公布日期	2005.04.06
申请号	EP20030762496	申请日期	2003.06.18
申请人	CARL ZEISS SMT AG	发明人	BADER, DIETER;RENG, NORBERT;WANGLER, JOHANNES
分类号	G02B19/00;G02B27/00;G03F7/20;H01L21/027;(IPC1-7):G03F7/20	主分类号	G02B19/00
代理机构		代理人
主权项
地址

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