SAMPLING FILTER FOR EVALUATING CONTAMINATIONS OF A CLEAN ROOM AND METHOD OF EVALUATING CONTAMINATIONS

摘要

A sampling filter for evaluating contamination of a clean room and a method for evaluating contamination by using a sampling filter are provided to collect samples with a predetermined size by using a filter. A sampling filter includes a filter(102), a filter frame(100), and a filter supporting member(104). The filter frame(100) is coupled/fixed with the filter(102). The filter supporting member(104) is fixed to the filter frame(100). The sample area(106) is specified in order to analyze contamination. Contamination is reduced because the sampling filter is installed at a circulation end part. A suitable filter is installed at the circulation end part according to the contamination. The sampling filter is installed according to the contamination component.