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发明名称
摘要
申请公布号
JP3636598(B2)
申请公布日期
2005.04.06
申请号
JP19980174587
申请日期
1998.06.22
申请人
发明人
分类号
H01L21/28;C23C16/06;C23C16/12;C23C16/20;C23C16/44;C23C16/455;H01L21/203;H01L21/285;H01L21/768;(IPC1-7):H01L21/285
主分类号
H01L21/28
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代理人
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