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发明名称
A forming method of contact
摘要
申请公布号
KR100479600(B1)
申请公布日期
2005.04.06
申请号
KR20010037422
申请日期
2001.06.28
申请人
发明人
分类号
G03F7/40;H01L21/28;H01L21/027;H01L21/3065;H01L21/311;H01L21/768;(IPC1-7):H01L21/28
主分类号
G03F7/40
代理机构
代理人
主权项
地址
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