发明名称 Interconnection structure in semiconductor device
摘要 There is provided a semiconductor device which comprises a second insulating film (29) formed on a substantially flat surface, on which a surface of a first wiring (36) and a surface of a first insulating film (95) are continued, to cover the first wiring (36), a wiring trench (28a) formed in the second insulating film (29), connection holes (38a) formed in the second insulating film (29) to extend from the wiring trench (28a) to the first wiring (36), dummy connection holes (38b) formed in the second insulating film (29) to extend from the wiring trench (28a) to a non-forming region of the first wiring, and a second wiring (39) buried in the connection holes (38a) and the wiring trench (28a) to be connected electrically to the first wiring (36) and also buried in the dummy connection holes (38b), and formed such that a surface of the second wiring (39) and a surface of the second insulating film (29) constitute a substantially flat surface. <IMAGE>
申请公布号 EP1326276(A3) 申请公布日期 2005.04.06
申请号 EP20020026987 申请日期 2002.12.05
申请人 FUJITSU LIMITED 发明人 WATANABE KENICHI;SHIMIZU, NORIYOSHI;SUZUKI, TAKAHASHI
分类号 H01L23/52;H01L21/3205;H01L21/768;H01L23/522;H01L23/528 主分类号 H01L23/52
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