| 发明名称 |
A focusing-device for the radiation from a light source |
| 摘要 |
<p>A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1') which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1') is displaceably connected to the mount (24) via a bearing in such a way that the collector mirror can be displaced at least perpendicular to the optical axis (35).</p> |
| 申请公布号 |
EP1521119(A2) |
申请公布日期 |
2005.04.06 |
| 申请号 |
EP20040022998 |
申请日期 |
2004.09.28 |
| 申请人 |
CARL ZEISS SMT AG |
发明人 |
ANTONI, MARTIN;MELZER, FRANK;SEIFERT, ANDREAS;SINGER, WOLFGANG |
| 分类号 |
G21K1/06;G02B5/10;G02B7/182;G02B17/02;G02B27/00;G02B27/30;G03F7/20;G21K5/00;G21K5/02;H01L21/027;(IPC1-7):G03F7/20 |
主分类号 |
G21K1/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
