发明名称 CYCLIC ERROR COMPENSATION IN INTERFEROMETRY SYSTEMS
摘要 <p>The invention features a method including: (i) providing an interference signal S(t) from two beams derived from a common source and directed along different paths, wherein the signal S(t) is indicative of changes in an optical path difference nL(t) between the different paths, where n is an average refractive index along the different paths, L(t) is a total physical path difference between the different paths, and t is time; (ii) providing coefficients representative of one or more errors that cause the signal S(t) to deviate from an ideal expression of the form A<SUB>1 </SUB>cos(omega<SUB>R</SUB>t+phi(t)+zeta<SUB>1</SUB>), where A<SUB>1 </SUB>and zeta<SUB>1 </SUB>are constants, omega<SUB>R </SUB>is an angular frequency difference between the two beams, and phi(t)=nkL(t), with k=2pi/lambda and lambda equal to a wavelength for the beams; (iii) calculating a quadrature signal S(t) based on the signal S(t); and (iv) reducing the deviation of S(t) from the ideal expression using an error signal S<SUB>psi</SUB>(t) generated from the coefficients and error basis functions derived from the signals S(t) and S(t).</p>
申请公布号 EP1520151(A1) 申请公布日期 2005.04.06
申请号 EP20030763176 申请日期 2003.07.08
申请人 ZYGO CORPORATION 发明人 HILL, HENRY, A.
分类号 G01B9/02;G03F7/20;H01L21/027;(IPC1-7):G01B9/02 主分类号 G01B9/02
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