| 发明名称 |
RELEASING METHOD AND RELEASING APPARATUS OF WORK HAVING ADHESIVE TAPE |
| 摘要 |
A releasing method and a releasing apparatus of work having adhesive tape are provided to prevent damage of the work by supplying a predetermined gas between the work and a work holding member. A work(29) having adhesive tape is detached from a work holding member(30). At this time, a predetermined gas for weakening the holding force of the work holding member is supplied to a portion between the work and the work holding member. The gas is sequentially supplied from center to edge of the work holding member. |
| 申请公布号 |
KR20050031886(A) |
申请公布日期 |
2005.04.06 |
| 申请号 |
KR20040073289 |
申请日期 |
2004.09.14 |
| 申请人 |
NITTO DENKO CORPORATION |
发明人 |
KANESHIMA, YASUJI;YAMAMOTO, MASAYUKI |
| 分类号 |
H01L21/78;B32B1/00;H01L21/00;H01L21/30;H01L21/301;H01L21/304;H01L21/68;H01L21/683;(IPC1-7):H01L21/78 |
主分类号 |
H01L21/78 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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