发明名称 Dense SRAM cells with selective SOI
摘要 A SRAM cell fabricated in SSOI (selective silicon on insulator) comprises cross coupled PFET pull-up devices P1, P2 and NFET pull-down devices N1, N2, with the P1, P2 devices being connected to the power supply and the N1, N2 devices being connected to the ground. A first passgate NL is coupled between a first bitline and the junction of the devices P1 and N1, with its gate coupled to a wordline, and a second passgate NR is coupled between a second bitline and the junction of devices P2 and N2, with its gate coupled to the wordline. Each of the pull-up devices P1, P2, the pull-down devices N1, N2, and the first and second passgates NL, NR are fabricated with selective SOI, with buried oxide being selectively provided under the drains of the pull-up devices P1 and P2, the drains of the pull-down devices N1 and N2, and the sources and drains of the passgate devices NL and NR.
申请公布号 US6876040(B1) 申请公布日期 2005.04.05
申请号 US20030735169 申请日期 2003.12.12
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 WANN HSINGJEN;ZHANG YING;WONG ROBERT C.;STEEGEN AN
分类号 H01L21/8244;H01L21/84;H01L27/11;H01L27/12;(IPC1-7):H01L27/01;H01L31/039;H01L29/76;H01L29/94 主分类号 H01L21/8244
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