发明名称 Micromechanical component as well as a method for producing a micromechanical component
摘要 A micromechanical component having a substrate beneath at least one structured layer, in the structured layer at least one functional structure being formed, a cap which covers the functional structure, between the cap and the functional structure at least one cavity being formed, and a connecting layer which connects the cap to structured layer, as well as a method for producing the micromechanical component. To obtain a compact and robust component, the connecting layer is formed from an anodically bondable glass, i.e. a bond glass, which has a thickness in the range of 300 nm to 100 mum, which may in particular be in the range of 300 nm to 50 mum.
申请公布号 US6876048(B2) 申请公布日期 2005.04.05
申请号 US20020066851 申请日期 2002.02.04
申请人 ROBERT BOSCH GMBH 发明人 FISCHER FRANK;HEIN PETER;GRAF ECKHARD
分类号 B81C99/00;B81B3/00;B81B7/00;B81C1/00;B81C3/00;(IPC1-7):H01L27/14;H01L29/82;H01L29/84 主分类号 B81C99/00
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