发明名称 Preparation and use of EXO-2-fluoroalkyl(bicyclo[2.2.1] hept-5-enes)
摘要 There is disclosed a composition comprising a mixture of endo- and exo-2-(bicyclo[2.2.1]hept-5-en-2-yl)-2,2-fluoroalkyl-ethan-2-ol which is rich in the exo isomer, preferably the endo/exo concentration ratio is no greater than 5/95. The composition is useful for forming a repeat unit of a polymer which polymer may further comprise additional repeat units derived-from tert-butyl acrylate, hydroxyadamantyl acrylate, protected or unprotected fluorinated-olefins, 2-methyl-2-adamantyl acrylate, 2-propenoic acid, 2-hydroxy-1,1,2-trimethylpropyl ester. Polymers of this invention are useful as the binder component of a photoresist composition for microlithography.
申请公布号 US6875555(B1) 申请公布日期 2005.04.05
申请号 US20030664303 申请日期 2003.09.16
申请人 E.I. DU PONT DE NEMOURS AND COMPANY 发明人 FEIRING ANDREW EDWARD;PETROV VIACHESLAV ALEXANDROVICH;SCHADT, III FRANK LEONARD
分类号 C07C33/44;C08F214/18;C08F232/02;G03C1/492;G03F7/004;G03F7/039;(IPC1-7):G03F7/004 主分类号 C07C33/44
代理机构 代理人
主权项
地址