发明名称 |
Developer waste liquid regenerating apparatus and method |
摘要 |
A developer liquid regenerating system is provided with a storage tank storing a TAAH (such as TMAH)- and photoresist-containing developer waste liquid, first separating means with NF membrane, connected to the waste liquid storage tank through conduits, a storage tank connected to the first separating means through a conduit, and second separating means with NF membrane, connected to the storage tank through conduits. The developer liquid regenerating system is also connected to a developing apparatus through a conduit connected to the storage tank, and to a developer liquid control/supply apparatus through a conduit connected to the storage tank.
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申请公布号 |
US6875359(B2) |
申请公布日期 |
2005.04.05 |
申请号 |
US20020305796 |
申请日期 |
2002.11.27 |
申请人 |
NAGASE & CO., LTD.;NAGASE CMS TECHNOLOGY CO., LTD. |
发明人 |
OGAWA SHU;KOBAYAKAWA YASUYUKI;KITAGAWA YOSHIYA;KIKUKAWA MAKOTO |
分类号 |
C02F1/44;B01D61/00;B01D61/14;B01D61/58;B01D63/06;H01L21/027;H01L21/306;(IPC1-7):B01D61/00 |
主分类号 |
C02F1/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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