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发明名称
METHOD FOR MANUFACTURING PUNCH FOR IMPRESSION NANOLITHOGRAPHY
摘要
申请公布号
PL362344(A1)
申请公布日期
2005.04.04
申请号
PL20030362344
申请日期
2003.09.22
申请人
INSTYTUT TECHNOLOGII ELEKTRONOWEJ
发明人
GRABIEC PIOTR;RANGELOW IWAJLO;ZABOROWSKI MICHAL
分类号
B81C1/00
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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