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发明名称
MANUFACTURING METHOD OF PLANARIZATION OF THE SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100483057(B1)
申请公布日期
2005.04.04
申请号
KR19970063273
申请日期
1997.11.26
申请人
HYNIX SEMICONDUCTOR INC.
发明人
OH, CHAN GWON
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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