| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for drawing with charged particle beams where drawing is performed precisely by focusing the charged particle beams to a desired position on the surface of a test piece rotated around an axis of a direction different from the advancing direction of the charged particle beams. SOLUTION: The device for drawing the charged particle beams comprises a charged particle beam source part 1 generating and emitting the charged particle beams, a height sensor part 4 for measuring the height of the surface of the test piece at a position different from the irradiating position with the charged particle beams, a convergent lens part 2 for converging the charged particle beams to the height of the surface of the test piece, a deflection part 3 for deflecting the charged particle beams, and a stage part 5 for holding and moving the test piece. The stage part 5 comprises a rotary driving part 5A for rotating the test piece with a direction which is not parallel to the advancing direction of the charged particle beams as an axis and a transmitted beam detection part 5B for detecting transmission of the charged particle beams. The convergent lens part 2 is controlled by the height sensor part 4, and the deflection part 3 is controlled by the transmitted beam detection part 5B. COPYRIGHT: (C)2005,JPO&NCIPI
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