| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for automatic supply of an observation sample to a microscope device that can be implemented at low cost to contribute to automation of small-quality sample inspection. SOLUTION: A controller 15 controls movement of a motor-driven stage 5 which is movable in three dimensions. A cassette 8 can contain a plurality of samples 7 and the electrically-driven stage 5 is moved to take a sample 7, stored in the cassette 8, out of the cassette 8 by mounting it on the electrically-driven stage 5. Restriction pins 10 and 11 change the mounting position of the sample 7 mounted on the electrically-driven stage 5 by moving the electrically-driven stage 5. COPYRIGHT: (C)2005,JPO&NCIPI
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