| 摘要 |
PROBLEM TO BE SOLVED: To provide a TS valve which can substantially reduce the number of parts arranged on a piping line of a piping installation of a semiconductor manufacturing equipment and can reduce a junction between a piping and a branch pipe or between the piping and a manual valve. SOLUTION: The TS valve for a resin piping line is provided with an intake into which a chemical agent solution is infused from the piping line and a T shape branch pipe. The T shape branch pipe has an intake and two offtakes, and the first offtake is formed in parallel with the intake, then the second offtake acts as an inlet of the manual valve part. The TS valve is also provided with the manual valve part which can discharge the solution to the second offtake by one of the offtakes of the branch pipe being connected to the inlet of the manual valve part and by shutting off or opening the flow of the solution infused from the inlet. COPYRIGHT: (C)2005,JPO&NCIPI
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